Invention Grant
- Patent Title: Piezoresistive micromechanical sensor component and corresponding measuring method
- Patent Title (中): 压电微机械传感器元件及相应的测量方法
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Application No.: US13635581Application Date: 2011-01-19
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Publication No.: US09110090B2Publication Date: 2015-08-18
- Inventor: Reinhard Neul , Christian Rettig , Achim Trautmann , Daniel Christoph Meisel , Alexander Buhmann , Manuel Engesser , Ando Feyh
- Applicant: Reinhard Neul , Christian Rettig , Achim Trautmann , Daniel Christoph Meisel , Alexander Buhmann , Manuel Engesser , Ando Feyh
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: DE102010002994 20100318
- International Application: PCT/EP2011/050641 WO 20110119
- International Announcement: WO2011/113625 WO 20110922
- Main IPC: G01P15/12
- IPC: G01P15/12 ; G01P15/09 ; G01P15/08

Abstract:
A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.
Public/Granted literature
- US20130098154A1 Piezoresistive Micromechanical Sensor Component and Corresponding Measuring Method Public/Granted day:2013-04-25
Information query
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