Invention Grant
US09115255B2 Crosslinked random copolymer films for block copolymer domain orientation
有权
用于嵌段共聚物结构取向的交联无规共聚物膜
- Patent Title: Crosslinked random copolymer films for block copolymer domain orientation
- Patent Title (中): 用于嵌段共聚物结构取向的交联无规共聚物膜
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Application No.: US13828803Application Date: 2013-03-14
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Publication No.: US09115255B2Publication Date: 2015-08-25
- Inventor: Padma Gopalan , Eungnak Han , Myungwoong Kim
- Applicant: Wisconsin Alumni Research Foundation
- Applicant Address: US WI Madison
- Assignee: Wisconsin Alumni Research Foundation
- Current Assignee: Wisconsin Alumni Research Foundation
- Current Assignee Address: US WI Madison
- Agency: Bell & Manning, LLC
- Main IPC: C03C15/00
- IPC: C03C15/00 ; C03C25/68 ; C23F1/00 ; C08J7/04 ; G03F7/00 ; B41N1/14

Abstract:
Surface-modifying layers, including neutral layers for vertical domain-forming block copolymers of styrene and methyl methacrylate are provided. Also provided are self-assembled block copolymer structures incorporating the surface modifying layers, methods of fabricating such structures and methods of using the structures in BCP lithography applications. The surface-modifying layers comprise a crosslinked copolymer film, wherein the crosslinked copolymers are random copolymers polymerized from styrene monomers and/or (meth)acrylate monomers and crosslinkable epoxy group-functionalized monomers. The crosslinked copolymer films are characterized by a high content of the crosslinkable epoxy group-functionalized monomer.
Public/Granted literature
- US20140263175A1 CROSSLINKED RANDOM COPOLYMER FILMS FOR BLOCK COPOLYMER DOMAIN ORIENTATION Public/Granted day:2014-09-18
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