Invention Grant
US09116117B2 Chemical sensor with sidewall sensor surface 有权
具有侧壁传感器表面的化学传感器

Chemical sensor with sidewall sensor surface
Abstract:
In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor. A material defines an opening overlying the floating gate conductor. The material comprises a conductive element having an inner surface defining a lower portion of a sidewall of the opening. A dielectric is on the conductive element and has an inner surface defining an upper portion of the sidewall.
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