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    Method for making a well disposed over a sensor
    1.
    发明授权
    Method for making a well disposed over a sensor 有权

    公开(公告)号：US10483123B2

    公开(公告)日：2019-11-19

    申请号：US15945707

    申请日：2018-04-04

    Applicant: Life Technologies Corporation

    Inventor： Phil Waggoner ,  Jordan Owens

    IPC: H01L21/311 ,  G01N27/414 ,  H01L21/02 ,  H01L21/027 ,  H01L21/285 ,  H01L21/3213

    Abstract: A method for forming a well providing access to a sensor pad includes patterning a first photoresist layer over a dielectric structure disposed over the sensor pad; etching a first access into the dielectric structure and over the sensor pad, the first access having a first characteristic diameter; patterning a second photoresist layer over the dielectric structure; and etching a second access over the dielectric structure and over the sensor pad. The second access has a second characteristic diameter. The first and second accesses overlapping. A diameter ratio of the first characteristic diameter to the second characteristic diameter is not greater than 0.7. The first access exposes the sensor pad. The second access has a bottom depth less than a bottom depth of the first access.

    CHEMICAL SENSOR WITH PROTRUDED SENSOR SURFACE
    2.
    发明申请
    CHEMICAL SENSOR WITH PROTRUDED SENSOR SURFACE 有权
    带传感器表面的化学传感器

    公开(公告)号：US20140264466A1

    公开(公告)日：2014-09-18

    申请号：US13801243

    申请日：2013-03-13

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Keith G. Fife ,  James Bustillo ,  Jordan Owens

    IPC: G01N27/414

    CPC classification number: G01N27/414

    Abstract: In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element on a sidewall of the opening and extending over an upper surface of the dielectric material.

    Abstract translation: 在一个实施方式中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 介电材料限定了延伸到浮动栅极导体的上表面的开口。 在开口的侧壁上并在电介质材料的上表面上延伸的导电元件。

    Chemical sensor with protruded sensor surface
    6.
    发明授权
    Chemical sensor with protruded sensor surface 有权
    化学传感器具有突出的传感器表面

    公开(公告)号：US08841217B1

    公开(公告)日：2014-09-23

    申请号：US13801243

    申请日：2013-03-13

    Applicant: Life Technologies Corporation

    Inventor： Keith Fife ,  James Bustillo ,  Jordan Owens

    IPC: H01L21/311 ,  G01N27/414

    CPC classification number: G01N27/414

    Abstract: In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element on a sidewall of the opening and extending over an upper surface of the dielectric material.

    Abstract translation: 在一个实施方式中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 介电材料限定了延伸到浮动栅极导体的上表面的开口。 在开口的侧壁上并在电介质材料的上表面上延伸的导电元件。

    Method for making a well disposed over a sensor
    7.
    发明授权
    Method for making a well disposed over a sensor 有权

    公开(公告)号：US11004690B2

    公开(公告)日：2021-05-11

    申请号：US16687630

    申请日：2019-11-18

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Phil Waggoner ,  Jordan Owens

    IPC: H01L21/311 ,  G01N27/414 ,  H01L21/02 ,  H01L21/027 ,  H01L21/285 ,  H01L21/3213

    Abstract: A method for forming a well providing access to a sensor pad includes patterning a first photoresist layer over a dielectric structure disposed over the sensor pad; etching a first access into the dielectric structure and over the sensor pad, the first access having a first characteristic diameter; patterning a second photoresist layer over the dielectric structure; and etching a second access over the dielectric structure and over the sensor pad. The second access has a second characteristic diameter. The first and second accesses overlapping. A diameter ratio of the first characteristic diameter to the second characteristic diameter is not greater than 0.7. The first access exposes the sensor pad. The second access has a bottom depth less than a bottom depth of the first access.

    Chemical sensor with air via
    8.
    发明授权
    Chemical sensor with air via 有权

    公开(公告)号：US10386328B2

    公开(公告)日：2019-08-20

    申请号：US15700630

    申请日：2017-09-11

    Applicant: Life Technologies Corporation

    Inventor： James Li ,  Jordan Owens ,  James Bustillo

    IPC: G01N27/414 ,  G01N27/12

    Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.

    System and Method for Forming Microwells
    10.
    发明申请
    System and Method for Forming Microwells 有权
    用于形成微孔的系统和方法

    公开(公告)号：US20150160153A1

    公开(公告)日：2015-06-11

    申请号：US14566098

    申请日：2014-12-10

    Applicant: LIFE TECHNOLOGIES CORPORATION

    Inventor： Shifeng LI ,  Jordan Owens

    IPC: G01N27/414

    CPC classification number: G01N27/4145 ,  B01L3/502707 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2200/12 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0663 ,  B01L2300/0877 ,  B01L2300/0887 ,  B01L2300/12 ,  H01L21/302

    Abstract: A method of forming a sensor component includes forming a first layer over a sensor pad of a sensor of a sensor array. The first layer includes a first inorganic material. The method further includes forming a second layer over the first layer. The second layer includes a polymeric material. The method also includes forming a third layer over the second layer, the third layer comprising a second inorganic material; patterning the third layer; and etching the second layer to define a well over the sensor pad of the sensor array.

    Abstract translation: 形成传感器部件的方法包括在传感器阵列的传感器的传感器焊盘上形成第一层。 第一层包括第一无机材料。 该方法还包括在第一层上形成第二层。 第二层包括聚合材料。 该方法还包括在第二层上形成第三层，第三层包括第二无机材料; 图案化第三层; 并蚀刻第二层以在传感器阵列的传感器焊盘上限定一个孔。

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