发明授权
- 专利标题: Chamber matching for power control mode
- 专利标题(中): 腔室匹配功率控制模式
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申请号: US13901509申请日: 2013-05-23
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公开(公告)号: US09119283B2公开(公告)日: 2015-08-25
- 发明人: Luc Albarede
- 申请人: Lam Research Corporation
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Martine Penilla Group, LLP
- 主分类号: H01J7/24
- IPC分类号: H01J7/24 ; H05H1/46 ; H01J37/32
摘要:
Systems and methods for performing chamber matching are described. One of the methods for performing chamber matching includes executing a first test within a first plasma chamber to measure a variable and executing a second test within a second plasma chamber to measure the variable. The first and second tests are executed based on one recipe. The method further includes determining a first relationship between the variable measured with the first test and power provided during the first test, determining a second relationship between the variable measured with the second test and power provided during the second test, and identifying power adjustment to apply to the second plasma chamber during a subsequent processing operation based on the first and second relationships. The power adjustment causes the second plasma chamber to perform the processing operation in a processing condition determined using the first plasma chamber.
公开/授权文献
- US20140265851A1 Chamber Matching For Power Control Mode 公开/授权日:2014-09-18
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