Invention Grant
- Patent Title: Chamber matching for power control mode
- Patent Title (中): 腔室匹配功率控制模式
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Application No.: US13901509Application Date: 2013-05-23
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Publication No.: US09119283B2Publication Date: 2015-08-25
- Inventor: Luc Albarede
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H05H1/46 ; H01J37/32

Abstract:
Systems and methods for performing chamber matching are described. One of the methods for performing chamber matching includes executing a first test within a first plasma chamber to measure a variable and executing a second test within a second plasma chamber to measure the variable. The first and second tests are executed based on one recipe. The method further includes determining a first relationship between the variable measured with the first test and power provided during the first test, determining a second relationship between the variable measured with the second test and power provided during the second test, and identifying power adjustment to apply to the second plasma chamber during a subsequent processing operation based on the first and second relationships. The power adjustment causes the second plasma chamber to perform the processing operation in a processing condition determined using the first plasma chamber.
Public/Granted literature
- US20140265851A1 Chamber Matching For Power Control Mode Public/Granted day:2014-09-18
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