Invention Grant
- Patent Title: Complementary metal-oxide-semiconductor device comprising silicon and germanium and method for manufacturing thereof
- Patent Title (中): 包含硅和锗的互补金属氧化物半导体器件及其制造方法
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Application No.: US13935324Application Date: 2013-07-03
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Publication No.: US09123566B2Publication Date: 2015-09-01
- Inventor: Jerome Mitard , Liesbeth Witters
- Applicant: IMEC
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP12174733 20120703
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/092 ; H01L21/8238 ; H01L21/84 ; H01L27/12

Abstract:
Disclosed are complementary metal-oxide-semiconductor (CMOS) devices and methods of manufacturing such CMOS devices. In some embodiments, an example CMOS device may include a substrate, and a buffer layer formed on the substrate, where the buffer layer comprises Si1-xGex, where x is less than 0.5. The example CMOS device may further include one or more pMOS channel layer elements, where each pMOS channel layer element comprises Si1-yGey, and where y is greater than x. The example CMOS device may still further include one or more nMOS channel layer elements, where each nMOS channel layer element comprises Si1-zGez, and where z is less than x. In some embodiments, the example CMOS device may be a fin field-effect transistor (FinFET) CMOS device and may further include a first fin structure including the pMOS channel layer element(s) and a second fin structure including the nMOS channel layer element(s).
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