Invention Grant
- Patent Title: Oxide semiconductor stacked film and semiconductor device
- Patent Title (中): 氧化物半导体层叠膜和半导体器件
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Application No.: US14527076Application Date: 2014-10-29
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Publication No.: US09123573B2Publication Date: 2015-09-01
- Inventor: Shunpei Yamazaki , Masashi Tsubuku , Ryosuke Watanabe , Masashi Oota , Noritaka Ishihara , Koki Inoue
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2012-173388 20120803
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L31/036 ; H01L31/0376 ; H01L31/20 ; H01L29/10 ; H01L29/24 ; H01L29/786 ; H01L21/66 ; H01L29/423

Abstract:
An oxide semiconductor stacked film which does not easily cause a variation in electrical characteristics of a transistor and has high stability is provided. Further, a transistor which includes the oxide semiconductor stacked film in its channel formation region and has stable electrical characteristics is provided. An oxide semiconductor stacked film includes a first oxide semiconductor layer, a second oxide semiconductor layer, and a third oxide semiconductor layer which are sequentially stacked and each of which contains indium, gallium, and zinc. The content percentage of indium in the second oxide semiconductor layer is higher than that in the first oxide semiconductor layer and the third oxide semiconductor layer, and the absorption coefficient of the oxide semiconductor stacked film, which is measured by the CPM, is lower than or equal to 3×10−3/cm in an energy range of 1.5 eV to 2.3 eV.
Public/Granted literature
- US20150048368A1 OXIDE SEMICONDUCTOR STACKED FILM AND SEMICONDUCTOR DEVICE Public/Granted day:2015-02-19
Information query
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