Invention Grant
- Patent Title: Method for fabricating micro electro device, method for fabricating organic light emitting display device, micro electro device and organic light emitting display device fabricated thereby
- Patent Title (中): 用于制造微电子器件的方法，制造有机发光显示器件的方法，由此制造的微电子器件和有机发光显示器件
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Application No.: US14017345Application Date: 2013-09-04
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Publication No.: US09123777B2Publication Date: 2015-09-01
- Inventor: Dan Bi Choi , Jung Hun Lee , Sun Ho Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2013-0017567 20130219
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/768 ; H01L21/3105 ; H01L21/311
Abstract:
A method for fabricating a micro electro device includes forming a conductive pattern on a substrate, forming an organic insulating film on a whole surface of the substrate with an organic insulating material to cover the conductive pattern, preparing a printing plate coated with an insulating film removing material, and forming a contact hole by removing a first portion of the organic insulating film through making the insulating film removing material come in contact with the first portion of the organic insulating film that corresponds to the conductive pattern, and forming a contact in the contact hole.
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