Invention Grant
- Patent Title: Liquid vaporizer
- Patent Title (中): 液体蒸发器
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Application No.: US13945710Application Date: 2013-07-18
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Publication No.: US09127359B2Publication Date: 2015-09-08
- Inventor: Masayuki Kouketsu , Hiroshi Itafuji
- Applicant: CKD CORPORATION
- Applicant Address: JP Komaki-shi, Aichi
- Assignee: CKD CORPORATION
- Current Assignee: CKD CORPORATION
- Current Assignee Address: JP Komaki-shi, Aichi
- Agency: Beyer Law Group LLP
- Priority: JP2011-009193 20110119
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/448 ; C23C14/24 ; B01B1/00 ; B01F3/02 ; B01D1/14 ; H01L21/67

Abstract:
A liquid vaporizer is configured to vaporize a liquid reagent and mix the vaporized liquid reagent with a gaseous medium. The liquid vaporizer is equipped with a main vaporizer body having a mixed gas generating space, and a vaporizing unit disposed inside the mixed gas generating space. The vaporizing unit has a vaporizing unit main body having a vaporization surface and a net-shaped body formed in a planar shape by knitting wires regularly in a net-like shape. The net-shaped body forms a plurality of mesh spaces surrounded by the wires and arranged regularly in the in-plane direction. The vaporizing unit forms a plurality of liquid reagent supply spaces surrounded by the wires and the vaporization surface as a result of the net-shaped body and the vaporization surface being abutted against each other. The liquid reagent supply spaces are arranged regularly in the in-plane direction of the net-shaped body.
Public/Granted literature
- US20130298834A1 LIQUID VAPORIZER Public/Granted day:2013-11-14
Information query
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