Invention Grant
US09127368B2 Etchant and method for manufacturing display device using the same
有权
用于制造使用其的显示装置的蚀刻剂和方法
- Patent Title: Etchant and method for manufacturing display device using the same
- Patent Title (中): 用于制造使用其的显示装置的蚀刻剂和方法
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Application No.: US14318815Application Date: 2014-06-30
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Publication No.: US09127368B2Publication Date: 2015-09-08
- Inventor: Seon-il Kim , In-Bae Kim , Hongsick Park , Jong-Hyun Choung , Inseol Kuk , Suckjun Lee , Giyong Nam , Youngchul Park , Inho Yu , Youngjin Yoon
- Applicant: SAMSUNG DISPLAY CO., LTD. , DONGWOO FINE-CHEM CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-do KR Iksan-si, Jeollabuk-do
- Assignee: SAMSUNG DISPLAY CO., LTD.,DONGWOO FINE-CHEM CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.,DONGWOO FINE-CHEM CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-do KR Iksan-si, Jeollabuk-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2013-0142280 20131121
- Main IPC: H01L21/3213
- IPC: H01L21/3213 ; C09K13/06 ; C09K13/08 ; C23F1/18
Abstract:
An etchant includes, based on a total amount of the etchant, from about 0.5 to about 20 wt % of a persulfate, from about 0.01 to about 2 wt % of a fluorine compound, from about 1 to about 10 wt % of an inorganic acid, from about 0.5 to about 5 wt % of an azole compound, from about 0.1 to about 5 wt % of an electron-donating compound, from about 0.1 to about 5 wt % of a chlorine compound, from about 0.05 to about 3 wt % of a copper salt, from about 0.1 to about 10 wt % of an organic acid or an organic acid salt, and a remaining amount of water.
Public/Granted literature
- US20150140712A1 ETCHANT AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME Public/Granted day:2015-05-21
Information query
IPC分类:
