Invention Grant
US09128277B2 Mechanical light modulators with stressed beams 有权
具有应力梁的机械光调制器

Mechanical light modulators with stressed beams
Abstract:
The invention relates to a light modulator including a substrate having a surface and a modulation assembly coupled to the substrate that includes a modulation element and a first compliant beam. The first compliant beam includes a first segment that extend away from a first anchor and a second segment that extends back towards the first anchor. The length of the first segment is different than the length of the second segment.
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