Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system
- Patent Title (中): 极紫外光发生装置的极紫外光发生装置和激光装置的控制方法
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Application No.: US14290483Application Date: 2014-05-29
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Publication No.: US09131589B2Publication Date: 2015-09-08
- Inventor: Hideyuki Hayashi , Kazuhiro Suzuki , Osamu Wakabayashi
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2013-114964 20130531
- Main IPC: H05G2/00
- IPC: H05G2/00 ; H01S3/10 ; H01S3/23 ; H01S3/00

Abstract:
An extreme ultraviolet light generation apparatus may include a chamber containing a plasma generation region irradiated by a pulse laser beam from a laser apparatus, a target supply device configured to supply a plurality of targets consecutively to the plasma generation region in the chamber, a target detection unit configured to detect a target outputted from the target supply device, and a laser controller configured to control the laser apparatus; the laser controller generating a light emission trigger instructing a laser device included in the laser apparatus to emit a pulse laser beam, and outputting the generated light emission trigger to the laser apparatus, in accordance with a detection signal from the target detection unit; and the laser controller adjusting generation of the light emission trigger outputted consecutively to the laser apparatus so that a time interval of the light emission trigger is within a predetermined range.
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