发明授权
- 专利标题: Fluid monitoring apparatus
- 专利标题(中): 流体监测装置
-
申请号: US13381332申请日: 2010-06-23
-
公开(公告)号: US09134146B2公开(公告)日: 2015-09-15
- 发明人: Thomas H. Baum , Ing-Shin Barry Chen , Richard D. Chism
- 申请人: Thomas H. Baum , Ing-Shin Barry Chen , Richard D. Chism
- 申请人地址: US MA Billerica
- 专利权人: ENTEGRIS, INC.
- 当前专利权人: ENTEGRIS, INC.
- 当前专利权人地址: US MA Billerica
- 代理机构: Hultquist, PLLC
- 代理商 Steven J. Hultquist; Maggie Chappuis
- 国际申请: PCT/US2010/039675 WO 20100623
- 国际公布: WO2011/008449 WO 20110120
- 主分类号: G01D11/24
- IPC分类号: G01D11/24
摘要:
A fluid monitoring apparatus, including a circuitry housing containing circuitry for processing fluid sensing signals and responsively transmitting an output, with a sensor assembly adapted for mechanical and electrical coupling to the circuitry housing. The sensor assembly includes at least one sensing member arranged to respond to a fluid species of interest in the monitored fluid, for generation of an output. The apparatus includes at least one of (A) a printed circuit board adapted to engage the circuitry housing and to mechanically couple to the sensor assembly, (B) the sensor assembly including a base and sensing element removably connected to the base by press-fit coupling elements, and (C) the sensor assembly including a base and a sensing filament connected thereto, and a filament guard to protectively circumscribe the sensing filament.
公开/授权文献
- US20120131990A1 FLUID MONITORING APPARATUS 公开/授权日:2012-05-31
信息查询