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公开(公告)号：US20120131990A1
公开(公告)日：2012-05-31
申请号：US13381332
申请日：2010-06-23
IPC分类号： G01N11/00
CPC分类号： G01D11/245
摘要： A fluid monitoring apparatus, including a circuitry housing containing circuitry for processing fluid sensing signals and responsively transmitting an output, with a sensor assembly adapted for mechanical and electrical coupling to the circuitry housing. The sensor assembly includes at least one sensing member arranged to respond to a fluid species of interest in the monitored fluid, for generation of an output. The apparatus includes at least one of (A) a printed circuit board adapted to engage the circuitry housing and to mechanically couple to the sensor assembly, (B) the sensor assembly including a base and sensing element removably connected to the base by press-fit coupling elements, and (C) the sensor assembly including a base and a sensing filament connected thereto, and a filament guard to protectively circumscribe the sensing filament.
摘要翻译： 一种流体监测装置，包括用于处理流体感测信号并且响应地传输输出的电路壳体，其具有适于机械和电耦合到电路壳体的传感器组件。 传感器组件包括至少一个感测构件，其被布置成响应被监视流体中感兴趣的流体种类，以产生输出。 该装置包括以下中的至少一个：（A）适于接合电路外壳并机械地耦合到传感器组件的印刷电路板中的至少一个;（B）传感器组件，包括基座和感测元件，该基座和感测元件通过压配合可移除地连接到基座 耦合元件，和（C）传感器组件，其包括基座和连接到其上的感测灯丝，以及灯丝防护罩，用于保护地围绕感测灯丝。
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公开(公告)号：US09134146B2
公开(公告)日：2015-09-15
申请号：US13381332
申请日：2010-06-23
IPC分类号： G01D11/24
CPC分类号： G01D11/245
摘要： A fluid monitoring apparatus, including a circuitry housing containing circuitry for processing fluid sensing signals and responsively transmitting an output, with a sensor assembly adapted for mechanical and electrical coupling to the circuitry housing. The sensor assembly includes at least one sensing member arranged to respond to a fluid species of interest in the monitored fluid, for generation of an output. The apparatus includes at least one of (A) a printed circuit board adapted to engage the circuitry housing and to mechanically couple to the sensor assembly, (B) the sensor assembly including a base and sensing element removably connected to the base by press-fit coupling elements, and (C) the sensor assembly including a base and a sensing filament connected thereto, and a filament guard to protectively circumscribe the sensing filament.
摘要翻译： 一种流体监测装置，包括用于处理流体感测信号并且响应地传输输出的电路壳体，其具有适于机械和电耦合到电路壳体的传感器组件。 传感器组件包括至少一个感测构件，其被布置成响应被监视流体中感兴趣的流体种类，以产生输出。 该装置包括以下中的至少一个：（A）适于接合电路外壳并机械地耦合到传感器组件的印刷电路板中的至少一个;（B）传感器组件，包括基座和感测元件，该基座和感测元件通过压配合可移除地连接到基座 耦合元件，和（C）传感器组件，其包括基座和连接到其上的感测灯丝，以及灯丝防护罩，用于保护地围绕感测灯丝。
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公开(公告)号：US20120111374A1
公开(公告)日：2012-05-10
申请号：US13291342
申请日：2011-11-08
申请人： Joseph R. Despres , James V. McManus , Richard D. Chism , Edward E. Jones , Joseph D. Sweeney , Steven G. Sergi , Ying Tang , Michael J. Wodjenski , Richard S. Ray , Barry Lewis Chambers
发明人： Joseph R. Despres , James V. McManus , Richard D. Chism , Edward E. Jones , Joseph D. Sweeney , Steven G. Sergi , Ying Tang , Michael J. Wodjenski , Richard S. Ray , Barry Lewis Chambers
CPC分类号： H01L21/67028 , H01J37/02 , H01J37/3171 , H01J2237/006 , H01J2237/022
摘要： Apparatus and methods for cleaning ion implanters and/or components thereof are described, utilizing cleaning agents reacted with residue deposits to effect removal thereof. An endpoint detection apparatus and method are also disclosed, which may be integrated in the cleaning apparatus and methods to provide highly efficient utilization of the cleaning agent and avoidance of deleterious effects that otherwise can occur when cleaning agents are continued to be exposed to an implanter or components thereof after cleaning has been completed.
摘要翻译： 描述了用于清洁离子注入机和/或其组分的装置和方法，利用与残余物沉积物反应以清除其的清洁剂。 还公开了端点检测装置和方法，其可以集成在清洁装置和方法中，以提供清洁剂的高效利用并避免当清洁剂继续暴露于注入机时可能发生的有害影响，或 清洁后的部件已经完成。
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4.发明申请公开(公告)号：US20120291627A1
公开(公告)日：2012-11-22
申请号：US13520557
申请日：2011-01-05
申请人： Glenn M. Tom , Joseph Patrick Menning , Matthew Kusz , Amy Koland , Donald D. Ware , Richard D. Chism
发明人： Glenn M. Tom , Joseph Patrick Menning , Matthew Kusz , Amy Koland , Donald D. Ware , Richard D. Chism
CPC分类号： B67D7/0261 , C02F1/001 , C02F1/20 , C02F2209/40 , F17C1/00 , F17C2201/0104 , F17C2201/0157 , F17C2201/054 , F17C2201/056 , F17C2201/058 , F17C2203/0604 , F17C2203/0617 , F17C2203/0624 , F17C2203/0629 , F17C2203/0636 , F17C2203/066 , F17C2203/0685 , F17C2205/0142 , F17C2205/0165 , F17C2205/0169 , F17C2205/0323 , F17C2205/0326 , F17C2205/0335 , F17C2205/0338 , F17C2205/0341 , F17C2205/0373 , F17C2205/0382 , F17C2205/0385 , F17C2205/0391 , F17C2209/219 , F17C2209/221 , F17C2221/03 , F17C2223/0123 , F17C2223/0153 , F17C2223/033 , F17C2223/043 , F17C2223/047 , F17C2227/0135 , F17C2227/0157 , F17C2227/0192 , F17C2227/0304 , F17C2227/0379 , F17C2227/041 , F17C2250/032 , F17C2250/0408 , F17C2250/043 , F17C2250/0439 , F17C2250/0443 , F17C2250/0452 , F17C2250/0478 , F17C2250/0491 , F17C2250/0495 , F17C2250/072 , F17C2260/016 , F17C2260/024 , F17C2265/012 , F17C2265/017 , F17C2265/022 , F17C2270/05 , F17C2270/0518 , Y10T137/2708
摘要： A dispensing assembly for a pressure dispense package includes a connector having separate and distinct liquid and extraction conduits, and having a pressurization gas conduit. A liner fitment adapter may include a longitudinal bore to receive a probe portion of a connector defining a liquid extraction conduit, and may include a lateral bore to enable removal of gas. Insertion of a connector into a dispensing assembly simultaneously makes fluidic connections between (a) a gas extraction conduit and a dispensing volume; (b) a liquid extraction conduit and the dispensing volume, and (c) a pressurization gas conduit and a space to be pressurized within a pressure dispense vessel. Presence of fluid or change in phase of flowing fluid within a fluid circuit may be sensed by comparing outputs of first and second temperature sensing elements, with one sensing element including a heater to increase temperature of the sensing element in exposure to gas but not in exposure to liquid. A system and method for fluid dispensing includes a first pressure dispense apparatus and a sensing element arranged to sense a condition correlative of approach to gas saturation of dispensed fluid, and in response to such sensed condition initiates dispensation by a second pressure dispense apparatus for combining pressure dispensed fluid flows supplied to a point of use.
摘要翻译： 用于压力分配包装的分配组件包括具有分开且不同的液体和抽出管道并具有加压气体导管的连接器。 衬垫配件适配器可以包括纵向孔，以容纳限定液体提取管道的连接器的探针部分，并且可以包括能够去除气体的侧向孔。 将连接器插入到分配组件中同时使得（a）气体抽出管道和分配容积之间的流体连接; （b）液体提取管道和分配容积，和（c）加压气体管道和在压力分配容器内被加压的空间。 可以通过比较第一和第二温度感测元件的输出与一个感测元件包括加热器来感测在流体回路内存在流体或流体流体相位变化，以增加暴露于气体中但不暴露于感测元件中的感测元件的温度 液体。 用于流体分配的系统和方法包括第一压力分配装置和感测元件，其被布置成感测与分配流体的气体饱和的接近相关的状态，并且响应于这种感测到的状态，启动由第二压力分配装置的分配，用于组合压力 分配的流体流动供应到使用点。
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公开(公告)号：US09347616B2
公开(公告)日：2016-05-24
申请号：US14119402
申请日：2012-05-24
申请人： Richard D. Chism , Andy Krell
发明人： Richard D. Chism , Andy Krell
IPC分类号： F16K27/00 , F17D1/04 , H01L21/67 , C23C16/44 , C23C16/448 , C23C16/455 , F17C13/04
CPC分类号： F17C13/04 , C23C14/48 , C23C16/44 , C23C16/4408 , C23C16/4482 , C23C16/45561 , F17C2205/0335 , F17D1/04 , G03F7/70 , H01L21/67017 , Y10T137/0318 , Y10T137/877
摘要： A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.
摘要翻译： 流体输送系统，其适于在净化期间隔离安瓿和/或生产线，包括将加压气体源连接到可再填充的安瓿的入口控制阀，连接可再填充的安瓿与使用位置的出口控制阀，过程控制 将过程管线连接到可再填充安瓿的阀门，过程隔离阀和布置在过程隔离阀和过程控制阀之间的净化供给阀，例如三通净化供给阀。 还公开了一种清洗流体输送系统的方法，包括关闭过程隔离阀，将过程管线连接到可再填充的安瓿，通过净化供给阀（例如三通净化供给阀）和循环 打开和关闭至少一次与过程管线相连的过程控制阀。 还描述了用于重新灌注安瓿和清洗流体供应系统的歧管。
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公开(公告)号：US20140083512A1
公开(公告)日：2014-03-27
申请号：US14119402
申请日：2012-05-24
申请人： Richard D. Chism , Andy Krell
发明人： Richard D. Chism , Andy Krell
IPC分类号： F17D1/04
CPC分类号： F17C13/04 , C23C14/48 , C23C16/44 , C23C16/4408 , C23C16/4482 , C23C16/45561 , F17C2205/0335 , F17D1/04 , G03F7/70 , H01L21/67017 , Y10T137/0318 , Y10T137/877
摘要： A fluid delivery system adapted to isolate an ampoule and/or process line during purge, including an inlet control valve connecting a source of pressurized gas to a refillable ampoule, an outlet control valve connecting the refillable ampoule to a location of use, a process control valve connecting a process line to the refillable ampoule, a process isolation valve, and a purge supply valve, e.g., a three-way purge supply valve, arranged between the process isolation valve and the process control valve. A method of purging a fluid delivery system is also disclosed, including closing a process isolation valve, connecting a process line to a refillable ampoule, supplying a purge gas through a purge supply valve, e.g., a three-way purge supply valve, and cycling open and close at least once a process control valve coupled to the process line. A manifold for use in refilling an ampoule and purging a fluid supply system is also described.
摘要翻译： 流体输送系统，其适于在净化期间隔离安瓿和/或生产线，包括将加压气体源连接到可再填充的安瓿的入口控制阀，连接可再填充的安瓿与使用位置的出口控制阀，过程控制 将过程管线连接到可再填充安瓿的阀门，过程隔离阀和布置在过程隔离阀和过程控制阀之间的净化供给阀，例如三通净化供给阀。 还公开了一种清洗流体输送系统的方法，包括关闭过程隔离阀，将过程管线连接到可再填充的安瓿，通过净化供给阀（例如三通净化供给阀）和循环 打开和关闭至少一次与过程管线相连的过程控制阀。 还描述了用于重新灌注安瓿和清洗流体供应系统的歧管。
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