发明授权
- 专利标题: Apparatus and method for treating substrate
- 专利标题(中): 底物处理装置及方法
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申请号: US13559838申请日: 2012-07-27
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公开(公告)号: US09136147B2公开(公告)日: 2015-09-15
- 发明人: Joo Jib Park , Oh Jin Kwon , Sungho Jang , Boong Kim
- 申请人: Joo Jib Park , Oh Jin Kwon , Sungho Jang , Boong Kim
- 申请人地址: KR Seobuk-Gu
- 专利权人: SEMES CO., LTD.
- 当前专利权人: SEMES CO., LTD.
- 当前专利权人地址: KR Seobuk-Gu
- 代理机构: Harness, Dickey & Pierce, PLC
- 优先权: KR10-2011-0076240 20110729; KR10-2011-0140008 20111222
- 主分类号: F27D1/18
- IPC分类号: F27D1/18 ; H01L21/67 ; F27B17/00
摘要:
Provided are an apparatus and method for treating a substrate. More particularly, an apparatus and method for treating a substrate through a supercritical process are provided. The apparatus includes: a housing having an entrance in a predetermined surface thereof and providing a space for performing a high pressure process; a support member disposed in the housing to support a substrate; a door for opening and closing the entrance; and a pressing member configured to apply a force to the door so as to close the housing during the high pressure process.
公开/授权文献
- US20130029282A1 APPARATUS AND METHOD FOR TREATING SUBSTRATE 公开/授权日:2013-01-31
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