Invention Grant
- Patent Title: Apparatus and method for treating substrate
- Patent Title (中): 底物处理装置及方法
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Application No.: US13559838Application Date: 2012-07-27
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Publication No.: US09136147B2Publication Date: 2015-09-15
- Inventor: Joo Jib Park , Oh Jin Kwon , Sungho Jang , Boong Kim
- Applicant: Joo Jib Park , Oh Jin Kwon , Sungho Jang , Boong Kim
- Applicant Address: KR Seobuk-Gu
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Seobuk-Gu
- Agency: Harness, Dickey & Pierce, PLC
- Priority: KR10-2011-0076240 20110729; KR10-2011-0140008 20111222
- Main IPC: F27D1/18
- IPC: F27D1/18 ; H01L21/67 ; F27B17/00

Abstract:
Provided are an apparatus and method for treating a substrate. More particularly, an apparatus and method for treating a substrate through a supercritical process are provided. The apparatus includes: a housing having an entrance in a predetermined surface thereof and providing a space for performing a high pressure process; a support member disposed in the housing to support a substrate; a door for opening and closing the entrance; and a pressing member configured to apply a force to the door so as to close the housing during the high pressure process.
Public/Granted literature
- US20130029282A1 APPARATUS AND METHOD FOR TREATING SUBSTRATE Public/Granted day:2013-01-31
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