发明授权
- 专利标题: Silicon carbide semiconductor device
- 专利标题(中): 碳化硅半导体器件
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申请号: US13531793申请日: 2012-06-25
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公开(公告)号: US09136372B2公开(公告)日: 2015-09-15
- 发明人: Shinichiro Miyahara , Masahiro Sugimoto , Hidefumi Takaya , Yukihiko Watanabe , Narumasa Soejima , Tsuyoshi Ishikawa
- 申请人: Shinichiro Miyahara , Masahiro Sugimoto , Hidefumi Takaya , Yukihiko Watanabe , Narumasa Soejima , Tsuyoshi Ishikawa
- 申请人地址: JP Toyota-shi
- 专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人地址: JP Toyota-shi
- 代理机构: Posz Law Group, PLC
- 优先权: JP2011-144320 20110629
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/78 ; H01L29/423 ; H01L29/04 ; H01L29/08 ; H01L29/10 ; H01L29/16
摘要:
In a silicon carbide semiconductor device, a plurality of trenches has a longitudinal direction in one direction and is arranged in a stripe pattern. Each of the trenches has first and second sidewalls extending in the longitudinal direction. The first sidewall is at a first acute angle to one of a (11-20) plane and a (1-100) plane, the second sidewall is at a second acute angle to the one of the (11-20) plane and the (1-100) plane, and the first acute angle is smaller than the second acute angle. A first conductivity type region is in contact with only the first sidewall in the first and second sidewalls of each of the trenches, and a current path is formed on only the first sidewall in the first and second sidewalls.
公开/授权文献
- US20130001592A1 SILICON CARBIDE SEMICONDUCTOR DEVICE 公开/授权日:2013-01-03
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