Invention Grant
US09142437B2 System for separately handling different size FOUPs 有权
用于分别处理不同尺寸的FOUP的系统

System for separately handling different size FOUPs
Abstract:
A system for separately handling different size FOUPs includes an end effector having a surface thereon for supporting a FOUP. The end effector and surface is configured to support different size FOUPs. A fixture or means for engaging and maintaining a FOUP, of different size FOUPs, included to position and maintain each of a different size FOUP on the end effector during transport thereof. A shelf is configured to receive each of said different size FOUPs. The end effector is thus capable of transporting either a first size FOUP or a second, smaller size FOUP.
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