Invention Grant
- Patent Title: System for separately handling different size FOUPs
- Patent Title (中): 用于分别处理不同尺寸的FOUP的系统
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Application No.: US13859773Application Date: 2013-04-10
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Publication No.: US09142437B2Publication Date: 2015-09-22
- Inventor: William J. Fosnight , Ryan J. Gallagher , Stephen B. Miner
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Wayne F. Reinke, Esq.
- Main IPC: B66F19/00
- IPC: B66F19/00 ; H01L21/677 ; H01L21/673

Abstract:
A system for separately handling different size FOUPs includes an end effector having a surface thereon for supporting a FOUP. The end effector and surface is configured to support different size FOUPs. A fixture or means for engaging and maintaining a FOUP, of different size FOUPs, included to position and maintain each of a different size FOUP on the end effector during transport thereof. A shelf is configured to receive each of said different size FOUPs. The end effector is thus capable of transporting either a first size FOUP or a second, smaller size FOUP.
Public/Granted literature
- US20140308108A1 SYSTEM FOR SEPARATELY HANDLING DIFFERENT SIZE FOUPS Public/Granted day:2014-10-16
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