发明授权
- 专利标题: Nano-ring gate electrode nanochannels
- 专利标题(中): 纳米环栅电极纳米通道
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申请号: US14225694申请日: 2014-03-26
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公开(公告)号: US09146211B1公开(公告)日: 2015-09-29
- 发明人: Binquan Luan , Sung-wook Nam
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: C12Q1/68
- IPC分类号: C12Q1/68 ; G01N27/414 ; G01N27/447
摘要:
A technique includes providing a nanodevice. A gate electrode structure has nanochannels with a first end connected to a first common trench and a second end connected to a second common trench. A gate electrode extends laterally as a continuous line on the gate electrode structure and is formed in each of the nanochannels. The gate electrode forms a separate nano-ring electrode around a partial circumference inside each of the nanochannels. The gate electrode is parallel to the first and second common trenches and is perpendicular to the nanochannels.
公开/授权文献
- US20150276664A1 NANO-RING GATE ELECTRODE NANOCHANNELS 公开/授权日:2015-10-01
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