Invention Grant
- Patent Title: Chip comprising a backside metal stack
- Patent Title (中): 芯片包括背面金属叠层
-
Application No.: US14296006Application Date: 2014-06-04
-
Publication No.: US09147624B2Publication Date: 2015-09-29
- Inventor: Gunther Mackh , Adolf Koller
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L23/29 ; H01L21/78 ; H01L23/00

Abstract:
A method for manufacturing a plurality of chips comprises the step of providing a wafer comprising a plurality of chip areas separated by one or more dicing lines, wherein the chip areas are arranged on a first main surface, the step of providing a laser absorption layer on a second main surface opposite to the first main surface and the step of providing a backside metal stack on the laser absorption layer. After that a laser light is applied to the laser absorption layer along the dicing lines before the chips are singulated along the dicing lines by using stealth dicing.
Public/Granted literature
- US20140284771A1 Method for Manufacturing a Plurality of Chips Public/Granted day:2014-09-25
Information query
IPC分类: