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US09147653B2 Method for off-grid routing structures utilizing self aligned double patterning (SADP) technology 有权
采用自对准双重图案(SADP)技术的离网布线结构的方法

Method for off-grid routing structures utilizing self aligned double patterning (SADP) technology
Abstract:
A method for efficient off-track routing and the resulting device are disclosed. Embodiments include: providing a hardmask on a substrate; providing a plurality of first mandrels on the hardmask; providing a first spacer on each side of each of the first mandrels; providing a plurality of first non-mandrel regions of the substrate being separated from the first mandrels and between two of the first spacers, each of the first mandrels, first non-mandrel regions, and first spacers having a width equal to a distance; and providing a second mandrel having a width of at least twice the distance and being separated from one of the first non-mandrel regions by a second spacer.
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