Invention Grant
US09147653B2 Method for off-grid routing structures utilizing self aligned double patterning (SADP) technology
有权
采用自对准双重图案(SADP)技术的离网布线结构的方法
- Patent Title: Method for off-grid routing structures utilizing self aligned double patterning (SADP) technology
- Patent Title (中): 采用自对准双重图案(SADP)技术的离网布线结构的方法
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Application No.: US14513834Application Date: 2014-10-14
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Publication No.: US09147653B2Publication Date: 2015-09-29
- Inventor: Lei Yuan , Jongwook Kye , Harry Levinson
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L21/308 ; H01L23/50 ; H01L21/768 ; H01L21/033 ; H01L21/311 ; H01L23/528

Abstract:
A method for efficient off-track routing and the resulting device are disclosed. Embodiments include: providing a hardmask on a substrate; providing a plurality of first mandrels on the hardmask; providing a first spacer on each side of each of the first mandrels; providing a plurality of first non-mandrel regions of the substrate being separated from the first mandrels and between two of the first spacers, each of the first mandrels, first non-mandrel regions, and first spacers having a width equal to a distance; and providing a second mandrel having a width of at least twice the distance and being separated from one of the first non-mandrel regions by a second spacer.
Public/Granted literature
- US20150028489A1 METHOD FOR OFF-GRID ROUTING STRUCTURES UTILIZING SELF ALIGNED DOUBLE PATTERNING (SADP) TECHNOLOGY Public/Granted day:2015-01-29
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