Invention Grant
- Patent Title: MEMS device and methods for manufacturing and using same
- Patent Title (中): MEMS器件及其制造和使用方法
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Application No.: US14479615Application Date: 2014-09-08
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Publication No.: US09148075B2Publication Date: 2015-09-29
- Inventor: Sason Sourani , Moshe Medina
- Applicant: STMicroelectronics International N.V.
- Applicant Address: NL Amsterdam
- Assignee: STMicroelectronics International N.V.
- Current Assignee: STMicroelectronics International N.V.
- Current Assignee Address: NL Amsterdam
- Agency: Gardere Wynne Sewell LLP
- Priority: IL211211 20110213
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H02N1/00 ; B81B7/00 ; G02B7/182 ; B81B3/00
Abstract:
A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.
Public/Granted literature
- US20150002916A1 MEMS DEVICE AND METHODS FOR MANUFACTURING AND USING SAME Public/Granted day:2015-01-01
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