公开(公告)号：US09148075B2

公开(公告)日：2015-09-29

申请号：US14479615

申请日：2014-09-08

Applicant: STMicroelectronics International N.V.

Inventor： Sason Sourani ,  Moshe Medina

IPC: G02B26/08 ,  H02N1/00 ,  B81B7/00 ,  G02B7/182 ,  B81B3/00

CPC classification number: H02N1/006 ,  B81B3/0043 ,  B81B7/00 ,  B81B7/008 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B7/1821 ,  G02B26/0841 ,  H02N1/008

Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.

Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。

公开(公告)号：US20150002916A1

公开(公告)日：2015-01-01

申请号：US14479615

申请日：2014-09-08

Applicant: STMicroelectronics International N.V.

Inventor： Sason Sourani ,  Moshe Medina

IPC: H02N1/00 ,  B81B7/00 ,  G02B7/182

CPC classification number: H02N1/006 ,  B81B3/0043 ,  B81B7/00 ,  B81B7/008 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B7/1821 ,  G02B26/0841 ,  H02N1/008

Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.

Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。