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公开(公告)号：US09459447B2
公开(公告)日：2016-10-04
申请号：US14174367
申请日：2014-02-06
Applicant: STMicroelectronics International N.V.
Inventor： Moshe Medina , Pinchas Chaviv , Yaron Fein
CPC classification number: G02B26/08 , B81C1/00603 , G02B26/0841 , H02N1/008
Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.
Abstract translation: 一种由绝缘层双层有源层绝缘体（DSOI）衬底形成的装置包括由绝缘层隔开的第一和第二有源层。 从基板形成静电梳驱动器，以包括由第一有源层形成的第一梳和由第二有源层形成的第二梳。 梳状驱动器可用于向微镜提供倾斜运动。 制造方法提供梳齿显示大于1:20的纵横比，第一和第二梳的梳齿之间的偏移距离小于约6μm。
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Patent Agency Ranking
公开(公告)号：US09148075B2
公开(公告)日：2015-09-29
申请号：US14479615
申请日：2014-09-08
Applicant: STMicroelectronics International N.V.
Inventor： Sason Sourani , Moshe Medina
CPC classification number: H02N1/006 , B81B3/0043 , B81B7/00 , B81B7/008 , B81B2201/033 , B81B2201/034 , B81B2201/042 , B81B2203/0109 , B81B2203/0181 , B81B2203/058 , G02B7/1821 , G02B26/0841 , H02N1/008
Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.
Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。
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公开(公告)号：US20150002916A1
公开(公告)日：2015-01-01
申请号：US14479615
申请日：2014-09-08
Applicant: STMicroelectronics International N.V.
Inventor： Sason Sourani , Moshe Medina
CPC classification number: H02N1/006 , B81B3/0043 , B81B7/00 , B81B7/008 , B81B2201/033 , B81B2201/034 , B81B2201/042 , B81B2203/0109 , B81B2203/0181 , B81B2203/058 , G02B7/1821 , G02B26/0841 , H02N1/008
Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.
Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。
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公开(公告)号：US20140153074A1
公开(公告)日：2014-06-05
申请号：US14174367
申请日：2014-02-06
Applicant: STMicroelectronics International N.V.
Inventor： Moshe Medina , Pinchas Chaviv , Yaron Fein
IPC: G02B26/08
CPC classification number: G02B26/08 , B81C1/00603 , G02B26/0841 , H02N1/008
Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.
Abstract translation: 一种由绝缘层双层有源层绝缘体（DSOI）衬底形成的装置包括由绝缘层隔开的第一和第二有源层。 从基板形成静电梳驱动器，以包括由第一有源层形成的第一梳和由第二有源层形成的第二梳。 梳状驱动器可用于向微镜提供倾斜运动。 制造方法提供梳齿显示大于1:20的纵横比，第一和第二梳的梳齿之间的偏移距离小于约6μm。
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公开(公告)号：US08693074B2
公开(公告)日：2014-04-08
申请号：US13663550
申请日：2012-10-30
Applicant: STMicroelectronics International N.V.
Inventor： Moshe Medina , Pinchas Chaviv , Yaron Fein
CPC classification number: G02B26/08 , B81C1/00603 , G02B26/0841 , H02N1/008
Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.
Abstract translation: 一种由绝缘层双层有源层绝缘体（DSOI）衬底形成的装置包括由绝缘层隔开的第一和第二有源层。 从基板形成静电梳驱动器，以包括由第一有源层形成的第一梳和由第二有源层形成的第二梳。 梳状驱动器可用于向微镜提供倾斜运动。 制造方法提供梳齿显示大于1:20的纵横比，第一和第二梳的梳齿之间的偏移距离小于约6μm。
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公开(公告)号：US20130050793A1
公开(公告)日：2013-02-28
申请号：US13663550
申请日：2012-10-30
Applicant: STMicroelectronics International N.V.
Inventor： Moshe Medina , Pinchas Chaviv , Yaron Fein
CPC classification number: G02B26/08 , B81C1/00603 , G02B26/0841 , H02N1/008
Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.
Abstract translation: 一种由绝缘层双层有源层绝缘体（DSOI）衬底形成的装置包括由绝缘层隔开的第一和第二有源层。 从基板形成静电梳驱动器，以包括由第一有源层形成的第一梳和由第二有源层形成的第二梳。 梳状驱动器可用于向微镜提供倾斜运动。 制造方法提供梳齿显示大于1:20的纵横比，第一和第二梳的梳齿之间的偏移距离小于约6μm。
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