发明授权
- 专利标题: Thin film transistor and method for manufacturing the same
- 专利标题(中): 薄膜晶体管及其制造方法
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申请号: US13757699申请日: 2013-02-01
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公开(公告)号: US09153651B2公开(公告)日: 2015-10-06
- 发明人: Sang Chul Lim , Ji-Young Oh , Seongdeok Ahn , Kyoung Ik Cho , Sang Seok Lee , Jae Bon Koo
- 申请人: Electronics and Telecommunications Research Institute
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2012-0105889 20120924
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/84 ; H01L29/26
摘要:
Provided are a thin film transistor and a method for manufacturing the same. The thin film transistor manufacturing method includes forming a gate electrode on a substrate, forming an active layer that is adjacent to the gate electrode and includes an oxide semiconductor, forming an oxygen providing layer on the active layer, forming a gate dielectric between the gate electrode and the active layer, forming source and drain electrodes coupled to the active layer, forming a planarizing layer covering the gate electrode and the gate dielectric, forming a hole exposing the active layer, and performing a heat treatment process onto the planarizing layer in an atmosphere of oxygen.
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