发明授权
- 专利标题: Nonvolatile memory device and method for manufacturing same
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US13884263申请日: 2010-12-06
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公开(公告)号: US09153774B2公开(公告)日: 2015-10-06
- 发明人: Yoshitaka Sasago , Masaharu Kinoshita , Mitsuharu Tai , Akio Shima , Kenzo Kurotsuchi , Takashi Kobayashi
- 申请人: Yoshitaka Sasago , Masaharu Kinoshita , Mitsuharu Tai , Akio Shima , Kenzo Kurotsuchi , Takashi Kobayashi
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Miles & Stockbridge P.C.
- 国际申请: PCT/JP2010/071830 WO 20101206
- 国际公布: WO2012/077174 WO 20120614
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L45/00 ; H01L27/102 ; H01L29/792 ; H01L27/24 ; H01L27/115 ; G11C13/00
摘要:
When a thin channel semiconductor layer formed on a side wall of a stacked film in which insulating films and gate electrodes are alternately stacked together is removed on the stacked film, a contact resistance between a vertical transistor including the channel semiconductor layer and the gate electrode, and a bit line formed on the stacked film is prevented from rising. As its means, a conductive layer electrically connected to the channel semiconductor layer is disposed immediately above the stacked film.
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