Invention Grant
US09164145B2 Apparatus and method for testing semiconductor device 有权
半导体器件测试装置及方法

Apparatus and method for testing semiconductor device
Abstract:
There are provided an apparatus for testing a semiconductor device and a method for testing a semiconductor device. The apparatus for testing a semiconductor device includes: a temperature detection unit detecting a temperature of a semiconductor device to generate a detected temperature; a controller comparing the detected temperature with a preset control temperature to generate a comparison result, and determining whether to cool the semiconductor device according to the comparison result; and a cooling unit cooling the semiconductor device according to a control of the controller, wherein the controller resets the control temperature, when the detected temperature is outside of a range of an operational temperature of the semiconductor device.
Public/Granted literature
Information query
Patent Agency Ranking
0/0