Invention Grant
- Patent Title: Apparatus and method for testing semiconductor device
- Patent Title (中): 半导体器件测试装置及方法
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Application No.: US13750882Application Date: 2013-01-25
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Publication No.: US09164145B2Publication Date: 2015-10-20
- Inventor: Shang Hoon Seo , Seung Hwan Kim , Suk Jin Ham
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-Si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee Address: KR Suwon-Si, Gyeonggi-Do
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2012-0129380 20121115
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
There are provided an apparatus for testing a semiconductor device and a method for testing a semiconductor device. The apparatus for testing a semiconductor device includes: a temperature detection unit detecting a temperature of a semiconductor device to generate a detected temperature; a controller comparing the detected temperature with a preset control temperature to generate a comparison result, and determining whether to cool the semiconductor device according to the comparison result; and a cooling unit cooling the semiconductor device according to a control of the controller, wherein the controller resets the control temperature, when the detected temperature is outside of a range of an operational temperature of the semiconductor device.
Public/Granted literature
- US20140133100A1 APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR DEVICE Public/Granted day:2014-05-15
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