发明授权
US09164376B2 Patterning nano-scale patterns on a film comprising unzipping copolymers
有权
在包含解链共聚物的薄膜上形成纳米尺度图案
- 专利标题: Patterning nano-scale patterns on a film comprising unzipping copolymers
- 专利标题(中): 在包含解链共聚物的薄膜上形成纳米尺度图案
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申请号: US13570922申请日: 2012-08-09
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公开(公告)号: US09164376B2公开(公告)日: 2015-10-20
- 发明人: Daniel J. Coady , Urs T. Duerig , Jane E. Frommer , Kazuki Fukushima , James L. Hedrick , Armin W. Knoll
- 申请人: Daniel J. Coady , Urs T. Duerig , Jane E. Frommer , Kazuki Fukushima , James L. Hedrick , Armin W. Knoll
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Cantor Colburn LLP
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/00
摘要:
The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g., thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g., into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain.