发明授权
US09164376B2 Patterning nano-scale patterns on a film comprising unzipping copolymers 有权
在包含解链共聚物的薄膜上形成纳米尺度图案

Patterning nano-scale patterns on a film comprising unzipping copolymers
摘要:
The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g., thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g., into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain.
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