Patterning nano-scale patterns on a film comprising unzipping copolymers
    1.
    发明授权
    Patterning nano-scale patterns on a film comprising unzipping copolymers 有权
    在包含解链共聚物的薄膜上形成纳米尺度图案

    公开(公告)号:US09164376B2

    公开(公告)日:2015-10-20

    申请号:US13570922

    申请日:2012-08-09

    IPC分类号: G03F7/20 G03F7/00

    摘要: The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g., thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g., into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain.

    摘要翻译: 本发明涉及用于图案化材料表面的方法。 提供其上具有聚合物膜的基板。 聚合物是选择性反应性聚合物(例如,热力学不稳定的):它能够在合适的刺激下解压缩。 探针用于在电影上创建图案。 在图案化期间,膜被局部刺激用于解链聚合物链。 因此,基本思想是向聚合材料提供刺激,其又自发分解成挥发性成分。 例如,为了破坏聚合物链中的单键,该膜被热刺激,这足以引发整个聚合物链的分解。

    PATTERNING NANO-SCALE PATTERNS ON A FILM COMPRISING UNZIPPING COPOLYMERS
    2.
    发明申请
    PATTERNING NANO-SCALE PATTERNS ON A FILM COMPRISING UNZIPPING COPOLYMERS 有权
    在包含非离子共聚物的薄膜上绘制纳米尺度图案

    公开(公告)号:US20120301672A1

    公开(公告)日:2012-11-29

    申请号:US13570921

    申请日:2012-08-09

    IPC分类号: B29C35/00

    摘要: The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g., thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g., into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain.

    摘要翻译: 本发明涉及用于图案化材料表面的方法。 提供其上具有聚合物膜的基板。 聚合物是选择性反应性聚合物(例如,热力学不稳定的):它能够在合适的刺激下解压缩。 探针用于在电影上创建图案。 在图案化期间,膜被局部刺激用于解链聚合物链。 因此,基本思想是向聚合材料提供刺激,其又自发分解成挥发性成分。 例如,为了破坏聚合物链中的单键,该膜被热刺激,这足以引发整个聚合物链的分解。

    Patterning nano-scale patterns on a film comprising unzipping copolymers
    6.
    发明申请
    Patterning nano-scale patterns on a film comprising unzipping copolymers 失效
    在包含解链共聚物的薄膜上形成纳米尺度图案

    公开(公告)号:US20120082944A1

    公开(公告)日:2012-04-05

    申请号:US12894412

    申请日:2010-09-30

    IPC分类号: G03F7/20 B32B3/00

    摘要: The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g., thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g., into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain.

    摘要翻译: 本发明涉及用于图案化材料表面的方法。 提供其上具有聚合物膜的基板。 聚合物是选择性反应性聚合物(例如,热力学不稳定的):它能够在合适的刺激下解压缩。 探针用于在电影上创建图案。 在图案化期间,膜被局部刺激用于解链聚合物链。 因此,基本思想是向聚合材料提供刺激,其又自发分解成挥发性成分。 例如,为了破坏聚合物链中的单键,该膜被热刺激,这足以引发整个聚合物链的分解。