发明授权
- 专利标题: Wiring structures for three-dimensional semiconductor devices
- 专利标题(中): 三维半导体器件接线结构
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申请号: US14157830申请日: 2014-01-17
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公开(公告)号: US09165611B2公开(公告)日: 2015-10-20
- 发明人: Jang-Gn Yun , Hong-Soo Kim , Hoo-Sung Cho
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, P.A.
- 优先权: KR10-2013-0005726 20130118
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; G11C5/06 ; H01L27/105 ; H01L27/115 ; H01L27/06
摘要:
Wiring structures of three-dimensional semiconductor devices and methods of forming the same are provided. The wiring structures may include an upper wordline and a lower wordline, each of which extends in a longitudinal direction. The upper wordline may include a recessed portion that extends for only a portion of the upper wordline in a transverse direction and the lower wordline may include a wiring area exposed by the recessed portion of the upper wordline. The wiring structures may also include an upper contact plug contacting the upper wordline and a lower contact plug contacting the wiring area. The upper and lower contact plugs may extend in a vertical direction.
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