Invention Grant
US09165928B2 Methods of forming gate structures for CMOS based integrated circuit products and the resulting devices
有权
为基于CMOS的集成电路产品形成栅极结构的方法和所得到的器件
- Patent Title: Methods of forming gate structures for CMOS based integrated circuit products and the resulting devices
- Patent Title (中): 为基于CMOS的集成电路产品形成栅极结构的方法和所得到的器件
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Application No.: US13918569Application Date: 2013-06-14
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Publication No.: US09165928B2Publication Date: 2015-10-20
- Inventor: Ruilong Xie , Kisik Choi
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/092

Abstract:
One illustrative method disclosed herein includes forming gate insulation layers and a first metal layer for NMOS and PMOS devices from the same material, selectively forming a first metal layer only for the PMOS device, and forming different shaped metal silicide regions within the NMOS and PMOS gate cavities. A novel integrated circuit product disclosed herein includes an NMOS transistor with an NMOS gate insulation layer, an NMOS metal silicide having a generally rectangular cross-sectional configuration and an NMOS metal layer positioned on the NMOS metal silicide region. The product also includes a PMOS transistor with the same gate insulation material, a first PMOS metal and a PMOS metal silicide region, wherein the NMOS and PMOS metal silicide regions are comprised of the same metal silicide.
Public/Granted literature
- US20140367788A1 METHODS OF FORMING GATE STRUCTURES FOR CMOS BASED INTEGRATED CIRCUIT PRODUCTS AND THE RESULTING DEVICES Public/Granted day:2014-12-18
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