Invention Grant
- Patent Title: Radiation shielding for a substrate holder
- Patent Title (中): 衬底支架的辐射屏蔽
-
Application No.: US13677133Application Date: 2012-11-14
-
Publication No.: US09167625B2Publication Date: 2015-10-20
- Inventor: Eric Shero , Michael Halpin , Jerry Winkler
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer LLP
- Main IPC: H05B3/68
- IPC: H05B3/68 ; A21B2/00 ; H05B1/02 ; H01L21/67
Abstract:
A reaction chamber including a substrate supporting member positioned within the reaction chamber, the reaction chamber having a first region and a second region, a shield positioned within the second chamber and movable with the substrate supporting member, and wherein the shield is adjacent at least a bottom surface of the substrate supporting member.
Public/Granted literature
- US20130126515A1 RADIATION SHIELDING FOR A SUBSTRATE HOLDER Public/Granted day:2013-05-23
Information query
