Invention Grant
US09170246B2 Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
有权
流体储存和分配系统包括流体储存和分配容器的动态流体监测
- Patent Title: Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
- Patent Title (中): 流体储存和分配系统包括流体储存和分配容器的动态流体监测
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Application No.: US14054497Application Date: 2013-10-15
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Publication No.: US09170246B2Publication Date: 2015-10-27
- Inventor: James Dietz , Steven E. Bishop , James V. McManus , Steven M. Lurcott , Michael J. Wodjenski , Robert Kaim , Frank DiMeo, Jr.
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Agency: Hultquist, PLLC
- Agent Steven H. Hultquist; Rosa Yaghmour
- Main IPC: G01D1/00
- IPC: G01D1/00 ; G01N33/00 ; H01L23/538 ; H01L23/00 ; H01L21/683 ; H01L25/03 ; H01L25/16 ; H05K1/18 ; G01F23/00 ; H01L21/56 ; H01L25/065 ; H05K3/46

Abstract:
A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.
Public/Granted literature
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