Invention Grant
- Patent Title: Mask and method of manufacturing the same
- Patent Title (中): 面膜及其制造方法
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Application No.: US14023765Application Date: 2013-09-11
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Publication No.: US09170484B2Publication Date: 2015-10-27
- Inventor: Tae Min Kang
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2013-0052617 20130509
- Main IPC: G03F1/22
- IPC: G03F1/22 ; G03F1/24 ; G03F1/68

Abstract:
A method of manufacturing a mask includes: providing a base substrate including light-absorbing layer patterns on a first surface thereof; providing a reflective layer on the light-absorbing layer patterns and the first surface of the base substrate; and providing reflective patterns by partially removing the reflective layer. The providing the reflective patterns includes removing the light-absorbing layer patterns and a portion of the reflective layer, by irradiating the light-absorbing layer patterns with laser light.
Public/Granted literature
- US20140335445A1 MASK AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-11-13
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