Invention Grant
US09170496B2 Method of pre-treating a wafer surface before applying a solvent-containing material thereon 有权
在将含有溶剂的材料涂覆在其上之前预处理晶片表面的方法

Method of pre-treating a wafer surface before applying a solvent-containing material thereon
Abstract:
A method for pre-treating a wafer surface before applying a material thereon. The method includes positioning the wafer on a rotating apparatus. The wafer is rotated at a first rotational speed between about 50 revolutions per minute (rpm) and about 300 rpm and for a period of about 1 second to about 10 seconds while dispensing a cleaning solvent on the wafer surface. The wafer is rotated at a second rotational speed between about 500 rpm and about 1,500 rpm for a period of about 1 second to about 10 seconds. The wafer is then rotated at a third rotational speed between about 50 rpm and about 300 rpm for a period of about 1 second to about 5 seconds. With the wafer rotating at the third rotational speed, a solvent-containing material is thereafter deposited on the surface of the wafer.
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