Invention Grant
US09170496B2 Method of pre-treating a wafer surface before applying a solvent-containing material thereon
有权
在将含有溶剂的材料涂覆在其上之前预处理晶片表面的方法
- Patent Title: Method of pre-treating a wafer surface before applying a solvent-containing material thereon
- Patent Title (中): 在将含有溶剂的材料涂覆在其上之前预处理晶片表面的方法
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Application No.: US13365660Application Date: 2012-02-03
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Publication No.: US09170496B2Publication Date: 2015-10-27
- Inventor: Chi-Hua Fu , Chung-Cheng Wang
- Applicant: Chi-Hua Fu , Chung-Cheng Wang
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Hauptman Ham, LLP
- Main IPC: B08B3/02
- IPC: B08B3/02 ; B08B3/00 ; B08B7/00 ; B08B7/04 ; G03F7/16 ; G03F7/09 ; G03F7/095

Abstract:
A method for pre-treating a wafer surface before applying a material thereon. The method includes positioning the wafer on a rotating apparatus. The wafer is rotated at a first rotational speed between about 50 revolutions per minute (rpm) and about 300 rpm and for a period of about 1 second to about 10 seconds while dispensing a cleaning solvent on the wafer surface. The wafer is rotated at a second rotational speed between about 500 rpm and about 1,500 rpm for a period of about 1 second to about 10 seconds. The wafer is then rotated at a third rotational speed between about 50 rpm and about 300 rpm for a period of about 1 second to about 5 seconds. With the wafer rotating at the third rotational speed, a solvent-containing material is thereafter deposited on the surface of the wafer.
Public/Granted literature
- US20130137034A1 METHOD OF PRE-TREATING A WAFER SURFACE BEFORE APPLYING A SOLVENT-CONTAINING MATERIAL THEREON Public/Granted day:2013-05-30
Information query
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