Invention Grant
- Patent Title: Three-dimensional memory and method of forming the same
- Patent Title (中): 三维记忆及其形成方法
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Application No.: US14163815Application Date: 2014-01-24
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Publication No.: US09171862B2Publication Date: 2015-10-27
- Inventor: Guan-Ru Lee
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L21/3105 ; H01L21/02 ; H01L49/02 ; H01L27/108

Abstract:
A method of forming a three-dimensional memory is provided. A stacked structure including semiconductor layers and insulating layers arranged alternately is formed on a substrate. The stacked structure is patterned to form a mesh structure having first strips extending in a first direction and second strips extending in a second direction. The first strips and the second strips intersect with each other. The mesh structure has first holes. A dielectric layer is formed in each first hole. At least a portion of the first strips of the mesh structure is removed to form second holes and bit line stacked structures separated from each other. A charge storage layer is formed on sidewall and bottom of each second hole. A gate pillar extending in a third direction is formed on each charge storage layer in the second hole. Word lines extending in the first direction are formed on the gate pillars.
Public/Granted literature
- US20150214241A1 THREE-DIMENSIONAL MEMORY AND METHOD OF FORMING THE SAME Public/Granted day:2015-07-30
Information query
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