Invention Grant
US09171904B2 FinFET device with dual-strained channels and method for manufacturing thereof
有权
具有双应变通道的FinFET器件及其制造方法
- Patent Title: FinFET device with dual-strained channels and method for manufacturing thereof
- Patent Title (中): 具有双应变通道的FinFET器件及其制造方法
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Application No.: US14086486Application Date: 2013-11-21
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Publication No.: US09171904B2Publication Date: 2015-10-27
- Inventor: Geert Eneman , Benjamin Vincent , Voon Yew Thean
- Applicant: IMEC
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Main IPC: H01L21/77
- IPC: H01L21/77 ; H01L29/10 ; H01L21/8238

Abstract:
A FinFET device and a method for manufacturing a FinFET device is provided. An example device may comprise a substrate including at least two fin structures. Each of the at least two fin structures may be in contact with a source and drain region and each of the at least two fin structures may include a strain relaxed buffer (SRB) overlying and in contact with the substrate and an upper layer overlying and in contact with the SRB. The composition of the upper layer and the SRB may be selected such that the upper layer of a first fin structure is subjected to a first mobility enhancing strain in the as-grown state, the first mobility enhancing strain being applied in a longitudinal direction from the source region to the drain region and where at least an upper part of the upper layer of a second fin structure is strain-relaxed.
Public/Granted literature
- US20140151766A1 FinFET DEVICE WITH DUAL-STRAINED CHANNELS AND METHOD FOR MANUFACTURING THEREOF Public/Granted day:2014-06-05
Information query
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