Invention Grant
- Patent Title: Neural sensing device and method for making the same
- Patent Title (中): 神经传感装置及其制作方法
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Application No.: US13840817Application Date: 2013-03-15
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Publication No.: US09173583B2Publication Date: 2015-11-03
- Inventor: Kuo-Hua Chen , Chih-Wei Chang , Jin-Chern Chiou
- Applicant: Advanced Semiconductor Engineering, Inc.
- Applicant Address: TW
- Assignee: Advanced Semiconductor Engineering, Inc.
- Current Assignee: Advanced Semiconductor Engineering, Inc.
- Current Assignee Address: TW
- Agency: Morgan Law Offices, PLC
- Main IPC: A61B5/0478
- IPC: A61B5/0478 ; A61B5/00 ; A61B5/04 ; A61B5/0492 ; H01L23/48 ; A61B5/0496 ; A61N1/05

Abstract:
The present invention provides a neural sensing device and method for making the same. The neural sensing device includes a base, an integrated circuit portion, a plurality of microprobes and at least one conductive via. The base has an active surface and a backside surface. The integrated circuit portion is disposed on the active surface of the base. The microprobes protrude from the backside surface of the base. The through silicon via is disposed in the base and electrically connects the integrated circuit portion and the microprobes. Each of the microprobes includes an isolation layer partially covering a conductive layer.
Public/Granted literature
- US20140275929A1 NEURAL SENSING DEVICE AND METHOD FOR MAKING THE SAME Public/Granted day:2014-09-18
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