公开(公告)号：US09173583B2

公开(公告)日：2015-11-03

申请号：US13840817

申请日：2013-03-15

Applicant: Advanced Semiconductor Engineering, Inc.

Inventor： Kuo-Hua Chen ,  Chih-Wei Chang ,  Jin-Chern Chiou

IPC: A61B5/0478 ,  A61B5/00 ,  A61B5/04 ,  A61B5/0492 ,  H01L23/48 ,  A61B5/0496 ,  A61N1/05

CPC classification number: A61B5/0478 ,  A61B5/04001 ,  A61B5/0492 ,  A61B5/0496 ,  A61B5/6868 ,  A61B2562/028 ,  A61B2562/043 ,  A61N1/0529 ,  H01L21/6835 ,  H01L21/6836 ,  H01L23/481 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/92 ,  H01L24/94 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2224/0231 ,  H01L2224/02331 ,  H01L2224/05569 ,  H01L2224/92 ,  H01L2224/94 ,  H01L21/76898 ,  H01L2224/03 ,  H01L2221/68304 ,  H01L21/304 ,  H01L21/56 ,  H01L2221/68381 ,  H01L21/78 ,  H01L2924/00014

Abstract: The present invention provides a neural sensing device and method for making the same. The neural sensing device includes a base, an integrated circuit portion, a plurality of microprobes and at least one conductive via. The base has an active surface and a backside surface. The integrated circuit portion is disposed on the active surface of the base. The microprobes protrude from the backside surface of the base. The through silicon via is disposed in the base and electrically connects the integrated circuit portion and the microprobes. Each of the microprobes includes an isolation layer partially covering a conductive layer.

Abstract translation: 本发明提供了一种神经感测装置及其制造方法。 神经感测装置包括基座，集成电路部分，多个微探针和至少一个导电通孔。 底座具有活动表面和背面。 集成电路部分设置在基座的有源表面上。 微型笔从底座的背面突出。 贯通硅通孔设置在基座中并电连接集成电路部分和微器件。 每个微探针包括部分地覆盖导电层的隔离层。

公开(公告)号：US20140275929A1

公开(公告)日：2014-09-18

申请号：US13840817

申请日：2013-03-15

Applicant: ADVANCED SEMICONDUCTOR ENGINEERING, INC.

Inventor： Kuo-Hua Chen ,  Chih-Wei Chang ,  Jin-Chern Chiou

IPC: A61B5/0478 ,  H01L21/768

CPC classification number: A61B5/0478 ,  A61B5/04001 ,  A61B5/0492 ,  A61B5/0496 ,  A61B5/6868 ,  A61B2562/028 ,  A61B2562/043 ,  A61N1/0529 ,  H01L21/6835 ,  H01L21/6836 ,  H01L23/481 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/92 ,  H01L24/94 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2224/0231 ,  H01L2224/02331 ,  H01L2224/05569 ,  H01L2224/92 ,  H01L2224/94 ,  H01L21/76898 ,  H01L2224/03 ,  H01L2221/68304 ,  H01L21/304 ,  H01L21/56 ,  H01L2221/68381 ,  H01L21/78 ,  H01L2924/00014

Abstract: The present invention provides a neural sensing device and method for making the same. The neural sensing device includes a base, an integrated circuit portion, a plurality of microprobes and at least one conductive via. The base has an active surface and a backside surface. The integrated circuit portion is disposed on the active surface of the base. The microprobes protrude from the backside surface of the base. The through silicon via is disposed in the base and electrically connects the integrated circuit portion and the microprobes. Each of the microprobes includes an isolation layer partially covering a conductive layer.

Abstract translation: 本发明提供了一种神经感测装置及其制造方法。 神经感测装置包括基座，集成电路部分，多个微探针和至少一个导电通孔。 底座具有活动表面和背面。 集成电路部分设置在基座的有源表面上。 微型笔从底座的背面突出。 贯通硅通孔设置在基座中并电连接集成电路部分和微器件。 每个微探针包括部分地覆盖导电层的隔离层。