Invention Grant
- Patent Title: Purge nozzle unit, purge apparatus and load port
- Patent Title (中): 吹扫喷嘴单元,吹扫装置和装载口
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Application No.: US13762991Application Date: 2013-02-08
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Publication No.: US09174253B2Publication Date: 2015-11-03
- Inventor: Mitsuo Natsume , Atsushi Suzuki
- Applicant: SINFONIA TECHNOLOGY CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2012-132210 20120611
- Main IPC: B65B1/04
- IPC: B65B1/04 ; B08B9/093 ; H01L21/673 ; H01L21/677

Abstract:
A purge nozzle unit 1 includes a nozzle main body 2 including a trunk 41 and a collar section 8 protruding outward from the trunk 41 and a holder 3 including a side wall 31 that is in slidable contact with an outward face of the collar section 8 and a bottom wall 33 having a through hole 32 with which an outward face of the trunk 41 is in slidable contact and is configured such that a vent 30 in communication with the outside is formed in the holder 3 and the nozzle main body 2 is vertically moved relative to the holder 3 by regulating a pressure in a pressure-regulated space S formed between the nozzle main body 2 and the holder 3 and in communication with the vent 30.
Public/Granted literature
- US20130326841A1 PURGE NOZZLE UNIT, PURGE APPARATUS AND LOAD PORT Public/Granted day:2013-12-12
Information query
IPC分类: