Invention Grant
- Patent Title: Method for fabricating two dimensional nanostructured tungsten carbide
- Patent Title (中): 制造二维纳米结构碳化钨的方法
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Application No.: US13746185Application Date: 2013-01-21
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Publication No.: US09175387B2Publication Date: 2015-11-03
- Inventor: Wook Seong Lee , Hak Joo Lee , Young Joon Baik , Jong Keuk Park
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Seoul
- Agency: Ladas & Parry LLP
- Priority: KR10-2012-0038556 20120413
- Main IPC: C23C16/32
- IPC: C23C16/32 ; H05H1/24 ; C23C16/448

Abstract:
2-dimensional nanostructured tungsten carbide which is obtained by control of the alignment of nanostructure during growth of tungsten carbide through control of the degree of supersaturation and a method for fabricating same are disclosed. The method for fabricating 2-dimensional nanostructured tungsten carbide employs a chemical vapor deposition process wherein a hydrogen plasma is applied to prepare 2-dimensional nanostructured tungsten carbide vertically aligned on a nanocrystalline diamond film. The chemical vapor deposition process wherein the hydrogen plasma is applied includes: disposing a substrate with the nanocrystalline diamond film formed thereon on an anode in a chamber, disposing a surface-carburized tungsten cathode above and at a distance from the substrate, and applying the hydrogen plasma into the chamber.
Public/Granted literature
- US20130273395A1 TWO-DIMENSIONAL NANOSTRUCTURED TUNGSTEN CARBIDE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-10-17
Information query
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