Invention Grant
- Patent Title: Thin film transistor display panel and manufacturing method thereof
- Patent Title (中): 薄膜晶体管显示面板及其制造方法
-
Application No.: US13464613Application Date: 2012-05-04
-
Publication No.: US09178024B2Publication Date: 2015-11-03
- Inventor: Ki-Won Kim , Kap Soo Yoon , Woo Geun Lee , Jin-Won Lee , Se-Myung Kwon , Jung Ouck Ahn , Si Jin Kim
- Applicant: Ki-Won Kim , Kap Soo Yoon , Woo Geun Lee , Jin-Won Lee , Se-Myung Kwon , Jung Ouck Ahn , Si Jin Kim
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2011-0132994 20111212
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/417 ; H01L29/66 ; H01L27/12 ; H01L29/786

Abstract:
A method for manufacturing a thin film transistor array panel includes forming a gate line and a gate electrode protruding from the gate line on a substrate; forming a gate insulating layer on the gate line and the gate electrode; depositing sequentially a semiconductor material and a metal material on the gate insulating layer; performing a first etching operation on the semiconductor material and the metal material using a first mask to form a semiconductor layer and a metal layer, the metal layer including a data line, a source electrode, and a drain electrode, in which the drain electrode protrudes from the data line, and the source electrode and the drain electrode having an integral shape; and performing a second etching operation on the metal layer using a second mask to divide the source electrode and the drain electrode.
Public/Granted literature
- US20130146864A1 THIN FILM TRANSISTOR DISPLAY PANEL AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-06-13
Information query
IPC分类: