Invention Grant
- Patent Title: Methods for forming resistive switching memory elements
- Patent Title (中): 形成电阻式开关存储元件的方法
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Application No.: US14264475Application Date: 2014-04-29
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Publication No.: US09178145B2Publication Date: 2015-11-03
- Inventor: Nitin Kumar , Tony P. Chiang , Chi-I Lang , Zhi-Wen Wen Sun , Jinhong Tong
- Applicant: Intermolecular Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Resistive switching memory elements are provided that may contain electroless metal electrodes and metal oxides formed from electroless metal. The resistive switching memory elements may exhibit bistability and may be used in high-density multi-layer memory integrated circuits. Electroless conductive materials such as nickel-based materials may be selectively deposited on a conductor on a silicon wafer or other suitable substrate. The electroless conductive materials can be oxidized to form a metal oxide for a resistive switching memory element. Multiple layers of conductive materials can be deposited each of which has a different oxidation rate. The differential oxidization rates of the conductive layers can be exploited to ensure that metal oxide layers of desired thicknesses are formed during fabrication.
Public/Granted literature
- US20140231744A1 Methods for forming resistive switching memory elements Public/Granted day:2014-08-21
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