发明授权
US09182375B2 Measuring apparatus and measuring method for metallic microstructures or material properties
有权
用于金属微观结构或材料特性的测量装置和测量方法
- 专利标题: Measuring apparatus and measuring method for metallic microstructures or material properties
- 专利标题(中): 用于金属微观结构或材料特性的测量装置和测量方法
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申请号: US13818236申请日: 2010-10-15
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公开(公告)号: US09182375B2公开(公告)日: 2015-11-10
- 发明人: Mitsuhiko Sano
- 申请人: Mitsuhiko Sano
- 申请人地址: JP Tokyo
- 专利权人: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- 当前专利权人: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 国际申请: PCT/JP2010/068127 WO 20101015
- 国际公布: WO2012/049764 WO 20120419
- 主分类号: G01N29/00
- IPC分类号: G01N29/00 ; G01N29/24 ; G01N21/17
摘要:
A pulse laser oscillator (11) outputs a first laser beam, a beam splitter splitting the first laser beam into split beams, optical paths (12, 13, 14, 15, 16) propagating light of split beams split, respectively, taking different times for light propagation thereof, a condenser superimposing light of split beams propagated through the optical paths, respectively, on an identical spot of a measuring material (100), for irradiation therewith, a laser interferometer (30) irradiating the measuring material (100) with light of a second laser beam, having light intensity variations resulted from interferences between reference light and light of the second laser beam reflected or scattered, as bases to detect ultrasonic waves energized by light of the first laser beam and transmitted in the measuring material (100), a waveform analyzer (32) calculating a metallic microstructure or a material property of the measuring material (100) based on ultrasonic waves.
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