Invention Grant
US09184206B1 Backside illuminated color image sensors and methods for manufacturing the same 有权
背面照明彩色图像传感器及其制造方法

Backside illuminated color image sensors and methods for manufacturing the same
Abstract:
A method for manufacturing a backside illuminated color image sensor includes (a) modifying the frontside of an image sensor wafer, having pixel arrays, to produce electrical connections to the pixel arrays, wherein the electrical connections extend depth-wise into the image sensor wafer from the frontside, and (b) modifying the backside of the image sensor wafer to expose the electrical connections.
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