Invention Grant
US09184287B2 Native PMOS device with low threshold voltage and high drive current and method of fabricating the same
有权
具有低阈值电压和高驱动电流的本机PMOS器件及其制造方法
- Patent Title: Native PMOS device with low threshold voltage and high drive current and method of fabricating the same
- Patent Title (中): 具有低阈值电压和高驱动电流的本机PMOS器件及其制造方法
-
Application No.: US13741157Application Date: 2013-01-14
-
Publication No.: US09184287B2Publication Date: 2015-11-10
- Inventor: Akira Ito
- Applicant: Broadcom Corporation
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/8234 ; H01L21/28 ; H01L29/06 ; H01L29/10 ; H01L21/8238 ; H01L29/49 ; H01L29/66 ; H01L21/762

Abstract:
A native p-type metal oxide semiconductor (PMOS) device that exhibits a low threshold voltage and a high drive current over a varying range of short channel lengths and a method for fabricating the same is discussed in the present disclosure. The source and drain regions of the native PMOS device, each include a strained region, a heavily doped raised region, and a lightly doped region. The gate region includes a stacked layer of a gate oxide having a high-k dielectric material, a metal, and a contact metal. The high drive current of the native PMOS device is primarily influenced by the increased carrier mobility due to the strained regions, the lower drain resistance due to the raised regions, and the higher gate capacitance due to the high-k gate oxide of the native PMOS device.
Public/Granted literature
- US20140197497A1 NATIVE PMOS DEVICE WITH LOW THRESHOLD VOLTAGE AND HIGH DRIVE CURRENT AND METHOD OF FABRICATING THE SAME Public/Granted day:2014-07-17
Information query
IPC分类: