发明授权
- 专利标题: Sensing apparatus
- 专利标题(中): 传感装置
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申请号: US14551091申请日: 2014-11-24
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公开(公告)号: US09190446B1公开(公告)日: 2015-11-17
- 发明人: Tsung-Han Chen , Chin-Mao Lin
- 申请人: Au Optronics Corporation
- 申请人地址: TW Hsinchu
- 专利权人: Au Optronics Corporation
- 当前专利权人: Au Optronics Corporation
- 当前专利权人地址: TW Hsinchu
- 代理机构: Jianq Chyun IP Office
- 优先权: TW103122336A 20140627
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L29/786 ; H01L31/028 ; H01L31/0376 ; H01L31/105 ; H01L31/0224
摘要:
A sensing apparatus that includes a plurality of sensing pixels is provided. The sensing pixels are arranged in an array, and each of the sensing pixels includes an active device and a sensing device. The sensing device is electrically connected to the active device, and the sensing device includes a first electrode layer, an amorphous silicon layer, a second electrode layer, and a graphene layer. The amorphous silicon layer is located on the first electrode layer. The second electrode layer is located on the amorphous silicon layer and has an opening. The graphene layer is in contact with the second electrode layer and the amorphous silicon layer.
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