Invention Grant
US09194797B2 Method and system for detecting moisture in a process gas involving cross interference 有权
用于检测涉及交叉干扰的工艺气体中的水分的方法和系统

Method and system for detecting moisture in a process gas involving cross interference
Abstract:
A system includes a moisture analyzer configured to detect moisture in a process gas. The moisture analyzer includes an absorption cell that encloses and conducts the process gas. The moisture analyzer also includes a pressure control device that may reduce a pressure of the process gas inside the absorption cell. The moisture analyzer includes a light emitting device that may transmit light through the process gas inside the absorption cell, as well as a photodetector that may detect an intensity of the light transmitted through the process gas and exiting the absorption cell.
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