Invention Grant
- Patent Title: Semiconductor package structure and manufacturing method thereof
- Patent Title (中): 半导体封装结构及其制造方法
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Application No.: US13352346Application Date: 2012-01-18
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Publication No.: US09196553B2Publication Date: 2015-11-24
- Inventor: Tsung-Jen Liao , Mei-Fang Peng , Cheng-Tang Huang
- Applicant: Tsung-Jen Liao , Mei-Fang Peng , Cheng-Tang Huang
- Applicant Address: TW Hsinchu
- Assignee: ChipMOS Technologies Inc.
- Current Assignee: ChipMOS Technologies Inc.
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW100130534A 20110825
- Main IPC: H01L23/60
- IPC: H01L23/60 ; H01L23/13 ; H01L23/498 ; H01L25/10 ; H01L21/683

Abstract:
A manufacturing method of semiconductor package structure includes: providing a first dielectric layer having multiple through holes; providing a second dielectric layer having multiple conductive vias and a chip-containing opening; laminating the second dielectric layer onto the first dielectric layer; disposing a chip in the chip-containing opening and adhering a rear surface of the chip onto the first dielectric layer exposed by the chip-containing opening; forming a redistribution circuit layer on the second dielectric layer wherein a part of the redistribution circuit layer extends from the second dielectric layer onto an active surface of the chip and the conductive vias so that the chip electrically connects the conductive vias through the partial redistribution circuit layer; forming multiple solder balls on the first dielectric layer wherein the solder balls are in the through holes and electrically connect the chip through the conductive vias and the redistribution circuit layer.
Public/Granted literature
- US20130049197A1 SEMICONDUCTOR PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-02-28
Information query
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